E-Beam Evaporator - Temescal

E-Beam Evaporator - Temescal
Technical information
  • E-beam evaporator
  • Materials available: Au, Ti, Ni, Al, Cr, Pd, Cu
  • Maximum wafer size: 6" (150 mm)
Tool Overview


Responsible: Johan Stjernholm

Location: Room Q158, EVA-Lab (Level 1)

License and Booking Required: Yes