Metrology / Characterisation

There are a number of characterisation techniques available in and out of the cleanroom laboratories at Lund Nano Lab.

These include:

• Scanning Electron Microscopes (SEM) for high resolution surface imaging;
• Energy Dispersive X-ray Spectroscopy (EDS) and Electron BackScatter Diffraction (EBSD) for chemical analysis and surface microstructural analysis;
• Atomic Force Microscopy (AFM) for topography, nanomechanical and electrical properties;
• stylus profilometry for quick and easy surface characterisation;
• X-Ray Diffraction (XRD) for characterisation of atomic structure;
• ellipsometry for measuring film thickness and optical properties;
• and several different setups for electrical device characterisation.

Below you find many of the different metrology/characterisation tools available to LNL users.

By clicking on the tools you can access a lot of useful information, such as user manuals, what kind of information one can obtain from the different tools, FAQs, user discussion forums etc.

The metrology/characterisation section is still a work in progress, for suggestions and questions please contact Peter Blomqvist.