There are a number of thin film systems available at Lund Nano Lab.
This includes:
- E-Beam evaporation
- Thermal evaporation
- Sputter
- Plasma enhanced chemical vapout deposition
- Atomic layer deposition
Below you find many of the different thin film tools available to LNL users.
By clicking on the tools you can access a lot of useful information, such as user manuals, available materials, and contact details for the tool responisible.
We have several thin films systems at LNL, including evaporation (both e-beam and thermal), sputter, atomic layer deposition and plasma enhanced chemical vapour depostion. For a list of available materials for each system type, select from the list below.
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