There are a number of thin film systems available at Lund Nano Lab.

This includes:

  • E-Beam evaporation
  • Thermal evaporation
  • Sputter
  • Plasma enhanced chemical vapout deposition
  • Atomic layer deposition

Below you find many of the different thin film tools available to LNL users.

By clicking on the tools you can access a lot of useful information, such as user manuals, available materials, and contact details for the tool responisible.

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