Technical information
Automated small chamber turbo pumped sputter coater mainly for SEM coating capable of high quality thin films with small grain size.
Materials currently available are Pt:Pd (80:20)
- Maximum wafer size: 4"
Tool Overview
Responsible: George Rydnemalm
Location: Cluster Tool room Q258, NANO-epitaxy Lab (Cleanroom Level 2).
License and Booking Required: Yes
Documentation
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