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Lund Nano Lab
Thin Films
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Old Version
111
changes.mady.by.user
user-ae6de
Saved on
2021 Feb 09
compared with
New Version
112
changes.mady.by.user
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Saved on
2021 Feb 09
Previous Change: Difference between versions 110 and 111
Next Change: Difference between versions 112 and 113
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E-Beam
Evaporator
-
Temescal
E-Beam
Temescal E-Beam Evaporator
Thermal Evaporator
- AVAC
Sputter - Quorum Q150T
Picosun Sunale R-100 - ALD
FIJI - ALD
Savannah-100 - ALD
Sputter - AJA Orion 5
PECVD - MicroSys 200
...
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