Technical information
- Acceleration Voltages: 5-30 kV.
- Pattern generator speed: 10Mhz.
- 6" Max sample size.
- Minimum resolution: 10 nm.
- Maximum probecurrent: 1nA
- Equipped with thermal field emission cathode and laser interferometer stage.
Tool Overview
- Responsible: Harald Havir / David Alcer
- Location: Room Q156, EBL-Lab (Cleanroom Level 1)
- License and Booking Required: Yes
Responsible staff:
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