Amirreza Ghassami
Research Engineer
Research engineer at Lund Nano Lab
In office- amirreza.ghassami@fysik.lu.se
- Phone
- +46 46 222 45 05
- Office
- Q140B
- Responsible for
- RIE - Trion T2 - F based, Microwave Plasma - TEPLA IonWave 10, EBL - Raith 150, ICP-RIE - APEX SLR - Cl based, ICP-RIE - APEX SLR - F based