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Technical information
- E-beam evaporator
- Materials available: Au, Ti, Ni, Al, Cr, Pd, Cu
- Maximum wafer size: 6" (150 mm)
Tool Overview
Responsible: David Fitzgerald
Location: Room Q158, EVA-Lab (Level 1)
License and Booking Required: Yes
Tool Summary
Tool Responsible: Insert tool owner name with email link
Location: Insert lab name or room number
List main tool capabilites here
FAQ
User Manuals
Staff Documents
Documentation
Other Links