Title: Dry Etching  
Author: user-ae6de 2020 May 05
Last Changed by: Sarah McKibbin 2021 Feb 12
Tiny Link: (useful for email) https://lundnanolab.ftf.lth.se/x/4oFYAQ
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Incoming Links
LundNanoLab (5)
    Page: RIE - Trion T2 - F based
    Page: ICP-RIE - APEX SLR - Cl based
    Page: UV Ozone Cleaner - UVOH150
    Page: Microwave Plasma - Plasma Preen
    Page: ICP-RIE - APEX SLR - F based
Hierarchy
Parent Page
    Home page: Lund Nano Lab
Children (7)
    Page: ICP-RIE - APEX SLR - Cl based
    Page: ICP-RIE - APEX SLR - F based
    Page: Microwave Plasma - Plasma Preen
    Page: Microwave Plasma - TEPLA IonWave 10
    Page: RF Plasma - Moorfield NanoEtch
    Page: RIE - Trion T2 - F based
    Page: UV Ozone Cleaner - UVOH150
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Page restrictions:
  • Only users in group F_ConfluenceLabAdmins can edit this page. (set by IT-Support at 2020-10-20 12:47)
  • Only users in group F_ConfluenceLabStaff can edit this page. (set by Alfons Eriksson at 2023-04-05 11:35)
  • Only al6463er can edit this page. (set by Alfons Eriksson at 2023-04-05 11:35)
Recent Changes
Time Editor  
2021-02-12 08:20 Sarah McKibbin View Changes
2021-02-12 08:20 Sarah McKibbin View Changes
2021-02-12 08:14 Sarah McKibbin View Changes
2021-02-12 08:14 Sarah McKibbin View Changes
2021-02-12 08:04 Sarah McKibbin  
Outgoing Links
External Links (2)
    https://lundnanolab.ftf.lth.se/display/FP/UV+Ozone+Cleaner+…
    https://lundnanolab.ftf.lth.se/display/FP/Microwave+Plasma+…
LundNanoLab (6)     Page: Microwave Plasma - TEPLA IonWave 10
    Page: RIE - Trion T2 - F based
    Page: Dry Etching
    Page: ICP-RIE - APEX SLR - F based
    Page: RF Plasma - Moorfield NanoEtch
    Page: ICP-RIE - APEX SLR - Cl based