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titleTechnical information

  • Automated small chamber turbo pumped sputter coater mainly for SEM coating capable of high quality thin films with small grain size.

  • Materials currently available are Pt:Pd (80:20)

  • E-beam evaporator
  • Materials available: Au, Ti, Ni, Al, Cr, Pd, Cu

  • Maximum wafer size: 64" (150 mm)



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titleTool Overview

Responsible:  David FitzgeraldGeorge Rydnemalm

Location: Room Q158, EVA-Cluster Tool room Q258, NANO-epitaxy Lab (Cleanroom Level 12).

License and Booking Required: Yes



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titleDocumentation

User Manuals

Process

Staff Documents



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titleOther Links

Safety Information

View on LIMS

FAQ

User Discussion Forum