• Automated small chamber turbo pumped sputter coater mainly for SEM coating capable of high quality thin films with small grain size.

  • Materials currently available are Pt:Pd (80:20)

  • Maximum wafer size: 4"



Responsible: Emil Eriksson

Location: Cluster Tool room Q258, NANO-epitaxy Lab (Cleanroom Level 2).

License and Booking Required: Yes



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