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NanoLund - Lund Nano Lab - myfab



Welcome to Lund Nano Lab's home page

Here you can find links to tool specific documentation including user manuals, process information, baseline data and safety information.

Click on one of the links below to be directed to the home page for that area




News and Information

2023-05-16: Next Milestone on Lund Universities road to Science Village: now we are recruiting a landlord

2021-04-14: Take a look at the recent SSF film that introduces the work of Mattias Borg at LNL


Lithography


Thin Films - targets inside sputter tool


Etching - Relection of ICP etch tool in wafer surface


Growth - SEM image of III-V nanowires grown in an array



Special Equipment

Chemical Processing - User wearing PPE

Facility

Page owner:

Luke Hankin luke.hankin@ftf.lth.se

Last update:

2020-09-22


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