The following is a list of frequently asked questions for FIB-SEM - FEI NanoLab 600. If you do not find your specific question here, please contact the tool repsonsible.
Question: How do I get a licence for this tool?
Answer: Users are required to train with existing tool users prior to applying for a licence on LIMS. You need to get licence for SEM part and then you can get additional training and apply for FIB license.
Question: How do I get my data from this tool?
Answer: You can get access to your data through New Labstore server. Our IT team can help you with access to the server. We strongly discourage USB-sticks as they may lead to computer infections. Please talk to the tool responsible if you absolutely need USB data transfer or better ask other tool users for the help with your data transfer.
Question: What is the maximum sample size?
Answer: It is possible to load up to 6'' wafer inside the chamber.
Question: What is the Eucentric position?
Answer: Working distance of about 5.3 mm corresponds to Eucentric height where the ion and electron beams are coincident.
Question: What is Touch Alarm?
Answer: Touch Alarm is a function that automatically stops the stage movement and displays Touch Alarm warning dialogue whenever the stage or a conductive specimen touches the Immersion lens or any other equipment conductively connected to the chamber.
Question: What is Z Tilt map?
Answer: Some movements of the stage are illegal because of possible collision with the end lens. In a z-tilt map, a number of z-tilt value pairs indicate the maximum tilt angle for a certain z when coupled. A legal move of the tilt axis depends on the position of the z axis. The relation between the extreme positions of tilt and z indicate the extreme allowed positions. This relation is called the z-tilt map and can be used to guarantee safe usage of the stage.