Technical information
- Combined focused Ga ion beam and scanning electron microscope
- Two electron detectors: E-T and in-lens
- Gas injection sources, Pt, W and SiOx
- Micromanipulator
Tool Overview
Responsible: Peter Blomqvist
Location: Room Q156, EBL-Lab (Cleanroom Level 1)
License and Booking Required: Yes
Main application: Focused ion beam milling and imaging
Documentation
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