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Technical information
  • Automated small chamber turbo pumped sputter coater mainly for SEM coating capable of high quality thin films with small grain size.

  • Materials currently available are Pt:Pd (80:20)

  • Maximum wafer size: ?"
Tool Overview

Responsible: George Rydnemalm

Location: Room Q?? Level 2

License and Booking Required: Yes

Documentation
Other Links

Safety Information

View on LIMS

FAQ

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