You are viewing an old version of this page. View the current version.

Compare with Current View Page History

« Previous Version 78 Next »



Tool Summary

  • Tool Responsible: David Fitzgerald

  • Location: EVA Lab

  • Maximum wafer size: 6" (150 mm)

  • Materials available: Au, Ti, Ni, Al, Cr, Pd, Cu

  • FAQ

Safety

User Manuals

Process

Staff Documents



     View on LIMS






  • No labels