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Metal organic vapor phase epitaxy (MOVPE) CCS is low pressure system dedicated for III-V material synthesis (mainly arsenide and antimonides)
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Responsible: Sebastian Lehmann & Sungyoun Ju Location: Room Q2XXQ252, Level 2 License and Booking Required: Yes |
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User ManualsProcessStaff Documents |
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Staff DocumentsView on LIMSFAQUser Discussion Forum |