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Lund Nano Lab (LNL) is our world-class clean room laboratory, with state-of-the-art semiconductor processing and metrology equipment. The clean room is available to users from academic research groups and industry. Here you can find links to tool specific documentation including user manuals, process information, baseline data and safety information. Click on one of the links below to be directed to the home page for that area. |
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2024-10-23: |
This site is under development. We welcome feedback regarding the layout, ease of use and requests for other information that you might like to see here.
This site is not a replacement for the LIMS tool booking system.
Useful Links:
Page owner:
Luke Hankin luke.hankin@ftf.lth.se
Last update:
20202024-0904-2230