The following is a list of frequently asked questions for FIB-SEM - FEI NanoLab 600. If you do not find your specific question here, please contact the tool repsonsible.
Question: How do I get a licence for this tool?
Answer: Users are required to train with existing tool users prior to applying for a licence on LIMS. You need to get licence for SEM part and then you can get additional training and apply for FIB license.
Question: What is the maximum sample size?
Answer: It is possible to load up to 6'' wafer inside the chamber.
Question: What is the Eucentric position?
Answer: Working distance of about 5.3 mm corresponds to Eucentric height where the ion and electron beams are coincident.
Question:What is Touch Alarm?
Answer: Touch Alarm is a function that automatically stops the stage movement and displays Touch Alarm warning dialogue whenever the stage or a conductive specimen touches the Immersion lens or any other equipment conductively connected to the chamber.
Question:What is Z Tilt map?
Answer: Some movements of the stage are illegal because of possible collision with the end lens. In a z-tilt map, a number of z-tilt value pairs indicate the maximum tilt angle for a certain z when coupled. A legal move of the tilt axis depends on the position of the z axis. The relation between the extreme positions of tilt and z indicate the extreme allowed positions. This relation is called the z-tilt map and can be used to guarantee safe usage of the stage.