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titleTechnical information
  • E-beam evaporator
  • Materials available: Au, Ti, Ni, Al, Cr, Pd, Cu
  • Maximum wafer size: 6" (150 mm)



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titleTool Overview

Responsible: David Fitzgerald

Location: Room Q158, EVA-Lab (Level 1)

License and Booking Required: Yes


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titleDocumentation

User Manuals

Process

Staff Documents



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titleOther Links

Safety Information

View on LIMS

FAQ