Technical information
- Max RPM:
- Programmable recipes.
- Manual and semi automatic coating available.
Tool Overview
Tool Responsible: Emil Eriksson
Chemical Responsible: Natalia Volkova
Process Support: Sarah McKibbin
Location: Room Q161, UVL-Lab (Cleanroom Level 1)
License and Booking Required: Yes (as Solvent Bench - 314)
Main application: Resist coating
Documentation
Other Links