• Max RPM:
  • Programmable recipes.
  • Manual and semi automatic coating available.

Tool Responsible: Emil Eriksson

Chemical Responsible: Natalia Volkova

Process Support: Sarah McKibbin

Location: Room Q161, UVL-Lab (Cleanroom Level 1)

License and Booking Required: Yes (as Solvent Bench - 314)

Main application: Resist coating




User Manuals

Process

Staff Documents





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