Technical information
- Soft UV contact mask aligner.
- Exposure of small pieces and full wafers.
- 4" max wafers.
- Mask sizes 3.5", 4" and 5".
- Bypass filter for line 365nm wavelength is installed for damping lines 405nm and 432nm.
Tool Overview
Responsible: Sarah McKibbin
Location: Room Q161, UVL - Lab (Level 1)
License and Booking Required: Yes
Documentation