• Soft UV contact mask aligner.
• Exposure of small pieces and full wafers.
• 4" max wafers.
• Mask sizes 3.5", 4" and 5".
• Bypass filter for line 365nm wavelength is installed for damping lines 405nm and 432nm.

Responsible: Sarah McKibbin

Location: Room Q161, UVL - Lab (Level 1)

License and Booking Required: Yes

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