Technical information
- Alpha SE variable angle spectroscopic ellipsometer
- Wavelength range: 390 - 900 nm
- Angles: 65, 70, 75 deg
- Max sample size: 6" diameter
Tool Overview
Responsible: Sarah McKibbin & ~ftf-pbo
Location: Level 2 - Q231 CMP lab
License and Booking Required: Yes
Main application: thin film characterization (film thickness, surface/interface & optical properties)
Documentation
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