• Alpha SE variable angle spectroscopic ellipsometer
  • Wavelength range: 390 - 900 nm
  • Angles: 65, 70, 75 deg
  • Max sample size: 6" diameter


Responsible:  Sarah McKibbin & ~ftf-pbo 

Location: Level 2 - Q231 CMP lab

License and Booking Required: Yes

Main application: thin film characterization (film thickness, surface/interface & optical properties)



User Manuals

Staff Documents

Process - Sample Models



Safety Information

View on LIMS

FAQ

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