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There are a number of characterisation techniques available in and out of the cleanroom laboratories at Lund Nano Lab.

This include:

  • Scanning Electron Microscopes (SEM) for high resolution surface imaging
  • Energy Dispersive X-ray Spectroscopy (EDS) and Electron BackScatter Diffraction (EBSD) for chemical analysis and surface microstructural analysis
  • Atomic Force Microscopy (AFM) for topography, nanomechanical and electrical properties
  • stylus profilometry for quick and easy surface characterisation
  • X-Ray Diffraction (XRD) for characterisation of atomic structure
  • ellipsometry for measuring film thickness and optical properties
  • and several different setups for electrical device characterisation

Below you find many of the different metrology/characterisation tools available to LNL users.

By clicking on the tools you can access a lot of useful information, such as user manuals, what kind of information one can obtain from the different tools, FAQs, user discussion forums etc.

The metrology/characterisation section is still a work in progress, for suggestions and questions please contact ~ftf-pbo.








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