Technical information
- ZEISS LEO - 1560 Scanning Electron Microscope (SEM)
- Schottky field emission gun
- In-lens SE & E-T SE detectors
- Capable of 1nm resolution at 20kV
- 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door
Tool Overview
Responsible: Alexander den Ouden & PB
Location: Room Q255, (Level 2)
License and Booking Required: Yes
Documentation