• Combined focused Ga ion beam and scanning electron microscope
• Gas injection sources, Pt, W and SiOx
• Micromanipulator

Responsible: Peter Blomqvist

Location: Room Q156, EBL-Lab (Cleanroom Level 1)

License and Booking Required: Yes

Main application: Focused ion beam milling and imaging

User Manuals

Process

Staff Documents

Safety Information

View on LIMS - SEM

View on LIMS - FIB

FAQ

User Discussion Forum