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Technical information
  • ZEISS GeminiSEM 500 Scanning Electron Microscope
  • Schottky field emission gun
  • Detectors:
    • In-lens SE & EsB
    • E-T SE
    • aBSD
    • aSTEM
    • EDS and EBSD (Oxford Instruments)
  • Load-lock
  • Plasma cleaner
Tool Overview

Responsible: ~ftf-pbo & Anders Kvennefors

Location: Room Q260, (Level 2)

License and Booking Required: Yes





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