The following is a list of frequently asked questions, if you do not find your specific question here, please contact the tool repsonsible.
Question: How do I get a license for this tool?
Answer: A one hour training session with tool responsible.
Question: What is the resolution?
Answer: Surface features (out-of-plane direction) down to roughly 10 nm can be measured, the in-plane resolution is limited by the radius (2 um) of the stylus.
Question: How long does a measurement take?
Answer: A line scan takes a few minutes to perform whereas a map scan takes much longer time, it depends on scan size and resolution.