Technical information
- ZEISS GeminiSEM 500 Scanning Electron Microscope (SEM)
- Schottky field emission gun
- Detectors:
- In-lens SE & EsB
- E-T SE
- aBSD
- aSTEM
- EDS and EBSD (Oxford Instruments)
- Load-lock
- Plasma cleaner
Tool Overview
Responsible: Peter Blomqvist & Anders Kvennefors
Location: Room Q260, (Level 2)
License and Booking Required: Yes
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