There are a number of characterisation techniques available in and out of the cleanroom laboratories at Lund Nano Lab.
This includes:
- scanning electron and optical microscopes for surface imaging
- atomic force microscopy for topography, nanomechanical and electrical properties
- scanning probe profilometry
- X-ray diffraction for characterisation of atomic structure
- ellipsometry for measuring film thickness and optical properties
- several different setups for electrical device characterisation
Below you find many of the different metrology/characterisation tools.
By clicking on the tool names you will find useful information on each tool, such as user manuals, what kind of information one can obtain, FAQ etc.
The metrology/characterisation section is still a work in progress, for suggestions and questions please contact PB.
