There are a number of characterisation techniques available in and out of the cleanroom laboratories at LNL.
This includes:
- scanning electron and optical microscopes for surface imaging
- atomic force microscopy for topography, nanomechanical and electrical properties
- scanning probe profilometry
- X-ray diffraction for characterisation of atomic structure
- ellipsometry for measuring film thickness and optical properties
- several different setups for electrical device characterisation
Below you find the many of the different metrology/characterisation tools.
By clicking on the tool names you will find a lot of useful information on each tool, such as user manuals, what kind of information one can obtain, FAQ etc.
The metrology/characterisation section is still a work in progress, for suggestions and questions please contact PB.
