Technical information
- ZEISS GeminiSEM 500 Scanning Electron Microscope (SEM)
- Schottky field emission gun
- Detectors: In-lens SE & EsB, E-T SE, aBSD, aSTEM, EDS and EBSD
- Load-lock
- Plasma cleaner
Tool Overview
Responsible: Peter Blomqvist & Anders Kvennefors
Location: Room Q260, (Level 2)
License and Booking Required: Yes
Documentation
Other Links