Technical information
- Main application: X-ray diffration
- Cu K-alpha radiation
- Goebel mirror and beam compressor
- Eulerian cradle with 4" wafer holder
- PathFinder detector (variable slit and three bounce Ge(220) crystal)
- Scans: 2T/T, reflectivity, GIXRD, rocking curve, RSM
Tool Overview
Responsible: Peter Blomqvist & Alexander den Ouden
Location: Room Q256, (Level 2)
License and Booking Required: Yes
Documentation
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