Technical information
- Main application: flash lamp annealing system using ultrashort flashes
- Preheating up to 800C via an under stage lamp heater
- 2 upper flash lamps for short pulse heating.
- Max pulse flash energy: 4.0kV
- Pulse duration between 1-10 ms.
- Controlled vacuum environment.
Tool Overview
Responsible: Alexander Den Ouden
Location: Room Q158, EVA-Lab (Cleanroom Level 1)
License and Booking Required: Yes
Documentation
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