Tool Summary
Tool Responsible: Sarah McKibbin
Location: Q161 UVL Lab (Level 1)
Maximum wafer size:
- Tool Information:
- Wavelength: 240nm to 320nm.
- Deep UV contact mask aligner, strongly damped soft UV region.
- Exposure of small pieces and full wafers.
- 4" max wafers.
- Mask sizes 3.5", 4" and 5".
FAQ