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Tool Summary

  • Tool Responsible: Peter Blomqvist & Anders Kvennefors

  • Location: Q260

  • License required: YES

  • Tool information:

    • Zeiss GeminiSEM 500
    • Schottky field emission
    • In-lens SE & EsB, E-T SE, aBSD, aSTEM, EDS and EBSD
    • Plasma cleaner

  • FAQ

Safety

User Manuals

Process

Staff Documents


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