Technical information
- Hitachi SU8700 Scanning Electron Microscope (SEM)
- Schottky field emission gun
- Detectors:
- In-lens SE & EsB
- E-T SE
- aSTEM
- EDS Bruker Flatquad - To be installed later
- 6" load-lock
Tool Overview
Responsible: ~ftf-pbo & Alexander den Ouden
Location: Room Q2, (Level 2)
License and Booking Required: Yes
Documentation
Other Links