Technical information
- Combined focused ion beam and scanning electron microscope with ultra-high resolution
- Gas injection sources, Pt, W and SiOx
- Omniprobe nanomanipulator
Tool Overview
Responsible: Peter Blomqvist & Alexander den Ouden
Location: Room Q156, EBL-Lab (Cleanroom Level 1)
License and Booking Required: Yes
Main application: Focused ion beam milling and imaging
Documentation
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