Tool Overview
Responsible: Sarah McKibbin and Anders Kvennefors
Location: Room Q158, EVA-Lab (Cleanroom Level 1)
License and Booking Required: Yes
Main application: Lamination of dry film resists
Technical information
- Loading plate for 4" wafers
- 65cm laminating width available
- SUEX films available (testing phase)
- Temperature control up to 149C
Documentation
User Manual
Process
Other Links