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Technical information
  • ZEISS LEO - 1560 Scanning Electron Microscope (SEM)
  • Schottky field emission gun
  • In-lens SE & E-T SE detectors
  • Capable of 1nm resolution at 20kV
  • 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door
Tool Overview

Responsible: Alexander den Ouden & PB

Location: Room Q255, (Level 2)

License and Booking Required: Yes




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