Tool Summary
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Tool Responsible: Dmitry Suyatin
Location: Q156 (Level 1 - EBL room)
License Required: Yes
Booking Compulsory: Yes
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Responsible: Luke Hankin Location: Room Q156, EBL-Lab (Cleanroom Level 1) License and Booking Required: Yes Supplier: Plasma-Therm / Advanced Vacuum Systems AB |
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User ManualsProcessStaff Documents |
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Safety Information |
View on LIMS |
FAQUser Discussion Forum |