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  • E-beam evaporator

Tool Summary

  • Tool Responsible: David Fitzgerald

  • Location: EVA Lab

    • Maximum wafer size: 6" (150 mm)
    • Materials available: Au, Ti, Ni, Al, Cr, Pd, Cu

  • FAQ - Temescal

    • Maximum wafer size: 6" (150 mm)



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    Responsible: Johan Stjernholm

    Location: Room Q158, EVA-Lab (Level 1)

    License and Booking Required: Yes



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    titleDocumentation
    Safety

    User Manuals

    Process

    Staff Documents



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    Safety Information

    View on LIMS

    FAQ

    User Discussion Forum

         BOOK on LIMS