Tool Summary
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Tool Responsible: Sarah McKibbin and Alex den Ouden
Location:Room Q156, EBL-Lab (Cleanroom Level 1)
License Required: Yes
Booking Required: Yes
Maximum wafer size: 6 inches
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Responsible: Sarah McKibbin and Alex den Ouden Location: Room Q156, EBL-Lab (Cleanroom Level 1) License and Booking Required: Yes |
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FAQ
User ManualsProcessStaff Documents |
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Safety InformationView on LIMS |
FAQsUser Discussion Forum |