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Tool Summary

  • Location: EVA Lab

    • Maximum wafer Size: 4"



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    titleTechnical information
    • E-beam evaporator
    (100 mm)
    • Materials available: Au, Ti, Ni, Al, Cr, Pd, Cu
    • Maximum wafer size: 6" (150 mm)



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    titleTool Overview

    Responsible

    : David Fitzgerald

  • FAQ

    • User Manual

    : Johan Stjernholm

    Location: Room Q158, EVA-Lab (Level 1)

    License and Booking Required: Yes



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    titleDocumentation

    User Manuals

    Process

    Staff Documents



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    titleOther Links

    Safety Information

    View on LIMS

    FAQ

    User Discussion Forum

    View filenameUser Manual.pdfheight150