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titleTechnical information
  • Main application: flash lamp annealing system using ultrashort flashes
  • Preheating up to 800C via an under stage IR lamp heater
  • 2 upper flash lamps for short pulse heating.
  • Max pulse flash energy: 4.0kV48J/cm2
  • Pulse duration between 10.3 -10 13 ms.
  • Controlled vacuum environment.
  • Process gases N2, O2 & 5%H2/95%N2



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titleTool Overview

Responsible:  Alexander Alexander Den Ouden

Location: Room Q158, EVA-Lab (Cleanroom Level 1)

License and Booking Required: Yes



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titleDocumentation

User Manuals

Process Information

Staff Documents



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titleOther Links

Safety Information 

View on LIMS

FAQ