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Responsible: Luke Hankin Location: Room Q156, EBL-Lab (Cleanroom Level 1) License and Booking Required: Yes Supplier: Plasma-Therm / Advanced Vacuum Systems AB |
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Tool Summary
Tool Responsible: Sarah Mckibbin
Location:
Maximum wafer size:
FAQ
User ManualsProcessStaff Documents |
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Safety InformationView on LIMS |
FAQUser Discussion Forum |